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Semi-H3PO4

OCI produces the high-purity phosphoric acid required in semiconductor production.

Product Features

Semi-H<sub>3</sub>PO<sub>4</sub>

Semi-H3PO4

Usage

Semiconductor wafer etchant material, LCD Etchant Material

Production Process

P4(yellow phosphorus) is combusted and undergoes hydration and refinement to produce phosphoric acid (75%, 85%). Additional refinement is executed to produce high-purity phosphoric acid for semiconductors.

OCI Status

Gunsan plant

Gunsan plant

OCI has produced H3PO4 since 2003 at our Gunsan plant in Korea. Our 30,000 metric ton plant produces 10,000 metric tons of commodity-grade and 20,000 metric tons of semiconductor-grade product for major customers.

Business Commencement

2007

Production Plant Status

Gunsan plant

Key Point

  • Dry Process

    Semiconductor grade phosphoric acid manufacturer using dry process

  • Leading Technology

    Far lower metal content in semi-conductor process compared to competitors

Details

  • Product Name : Phosphoric Acid
  • Chemical Formula : Semi-H3PO4
  • CAS No. : 7664-38-2
  • Certification : : OHSAS 18001, RoHS, ISO 9001, ISO 14001
  • Tel : +82-2-727-9486
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